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D01500 - SEMI D15 - FPD Glass Substrate Surface Waviness Measurement Method StdPbc-0317 The SEM consists of equipment

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Description

The SEM consists of equipment characteristics and behaviors that are applicable to this class of equipment

and categorizes each time segment as a type of active or wait time

SEMI D63-0818 (technical revision)

• the purity of the gases used for mixture preparation

帯電した表面への微粒子吸着を低減する。

D01500 - SEMI D15 - FPD Glass Substrate Surface Waviness Measurement Method StdPbc-0317 The SEM consists of equipmentThis method was technically approved by the global Flat Panel Display Committee and is the direct responsibility of the Japanese FPD Materials and Components Committee. Current edition approved by the Japanese Regional Standards Committee on April 28, 2003. Initially available at www. semi. org June 2003; to be published July 2003. Originally published December 1996. This document covers the measurement of FPD glass substrate surface waviness by

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