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SEMI E6-84 (technical revision)
A3-1（図）に変更が加えられた。
本仕様の2番目の重点項目は，半導体プロセス装置の構成に用いられるサブシステムおよびコンポーネントであり，以下のものを含むがこれらに限定されない。
but that is beyond the scope of this Standard
18-0914 (technical revision)
C00351 - SEMI C3.51 - 三塩化ホウ素（BCl3），品質99.98%の仕様 StdVol-Equipment Automation Hardware SEMI E6-84 (technical revision)NOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI Gases Chemicals Global Technical Committee20111234global Audits and Reviews Subcommittee20123www. semiviews. org www. semi. org2011111995 NOTICE: This Document was balloted and approved for withdrawal in 2012; it has been replaced by